Segmented Control of Electrostatically Actuated Bimorph Beams
نویسندگان
چکیده
منابع مشابه
Segmented Control of Electrostatically Actuated Bimorph Beams
This research focused on improving the control and sensing of electrostatically actuated, large deflection bimorph beams for optical beam steering. Current iterations of designs utilize a ‘zipper’ beam and have demonstrated large deflection angles. However, with these devices precise control and deflection measurements can be difficult to achieve. Through using segmented bias channels of doped ...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2017
ISSN: 2504-3900
DOI: 10.3390/proceedings1040306